An Investigation of Structural Dimension Variation in Electrostatically Coupled MEMS Resonator Pairs Using Mode Localization
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چکیده
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ژورنال
عنوان ژورنال: IEEE Sensors Journal
سال: 2016
ISSN: 1530-437X,1558-1748,2379-9153
DOI: 10.1109/jsen.2016.2573850